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Microstructure and Chemical Bonding in Silicon Carbonitride Films Synthesized by Plasma Enhanced Chemical Vapor Deposition

✍ Scribed by T. P. Smirnova; A. M. Badalyan; V. O. Borisov; L. V. Yakovkina; V. V. Kaichev; A. N. Shmakov; A. V. Nartova; V.I. Rakhlin; A. N. Fomina

Book ID: 111546555
Publisher: SP MAIK Nauka/Interperiodica
Year: 2003
Tongue: English
Weight: 331 KB
Volume: 44
Category: Article
ISSN: 0022-4766
DOI: 10.1023/a:1024953518950

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