Chemical Composition of Boron Carbonitride Films Grown by Plasma-Enhanced Chemical Vapor Deposition from Trimethylamineborane

✍ Scribed by M. L. Kosinova; Yu. M. Rumyantsev; A. N. Golubenko; N. I. Fainer; B. M. Ayupov; I. P. Dolgovesova; B. A. Kolesov; V. V. Kaichev; F. A. Kuznetsov

• Book ID: 110432978
• Publisher: SP MAIK Nauka/Interperiodica
• Year: 2003
• Tongue: English
• Weight: 117 KB
• Volume: 39
• Category: Article
• ISSN: 0020-1685
• DOI: 10.1023/a:1023227716045