High quality ZnO thin films grown by plasma enhanced chemical vapor deposition

✍ Scribed by Li, B. S.; Liu, Y. C.; Chu, Z. S.; Shen, D. Z.; Lu, Y. M.; Zhang, J. Y.; Fan, X. W.

• Book ID: 121242378
• Publisher: American Institute of Physics
• Year: 2002
• Tongue: English
• Weight: 335 KB
• Volume: 91
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.1415545