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Plasma enhanced chemical vapor deposition of ZnO thin films

✍ Scribed by P.K. Shishodia; H.J. Kim; A. Wakahara; A. Yoshida; G. Shishodia; R.M. Mehra

Book ID: 116669242
Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 246 KB
Volume: 352
Category: Article
ISSN: 0022-3093
DOI: 10.1016/j.jnoncrysol.2006.01.086

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