✦ LIBER ✦

Chemical and morphological properties of amorphous silicon oxynitride films deposited by plasma enhanced chemical vapor deposition

✍ Scribed by W.L. Scopel; R.R. Cuzinatto; M.H. Tabacniks; M.C.A. Fantini; M.I. Alayo; I. Pereyra

No coin nor oath required. For personal study only.

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