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Micromechanics compatible with an 0.8 μm CMOS process

✍ Scribed by M. Biebl; T. Scheiter; C. Hierold; H.v. Philipsborn; H. Klose

Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
555 KB
Volume
47
Category
Article
ISSN
0924-4247

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