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Metal-oxide-semiconductor capacitors with erbium oxide dielectrics on In[sub 0.53]Ga[sub 0.47]As channels

✍ Scribed by Hwang, Yoontae; Wistey, Mark A.; Cagnon, JoeÌl; Engel-Herbert, Roman; Stemmer, Susanne

Book ID: 120983690
Publisher: American Institute of Physics
Year: 2009
Tongue: English
Weight: 521 KB
Volume: 94
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.3106618

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