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Mechanical properties of thin ceramic coatings of the SiCN system deposited by reactive ion-plasma sputtering

✍ Scribed by Novikov, N.V.; Voronkin, M.A.; Zaika, N.I.

Book ID: 122619512
Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 328 KB
Volume: 1
Category: Article
ISSN: 0925-9635
DOI: 10.1016/0925-9635(92)90170-S

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