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Structure and mechanical properties of Ti–Si–C coatings deposited by magnetron sputtering

✍ Scribed by Koutzaki, S. H.; Krzanowski, J. E.; Nainaparampril, J. J.


Book ID
121689536
Publisher
AVS (American Vacuum Society)
Year
2001
Tongue
English
Weight
921 KB
Volume
19
Category
Article
ISSN
0734-2101

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Motivated by the success of transition metal nanocomposite hard coatings, a new optically transparent coating based on the Al-Si-N ternary system was developed. Al-Si-N thin films were deposited by reactive DC magnetron co-sputtering of Al and Si targets in an Ar/N 2 atmosphere at 200 °C and 500 °C