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Structural, mechanical and electrical-contact properties of nanocrystalline-NbC/amorphous-C coatings deposited by magnetron sputtering

✍ Scribed by Nils Nedfors; Olof Tengstrand; Erik Lewin; Andrej Furlan; Per Eklund; Lars Hultman; Ulf Jansson


Book ID
113919532
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
979 KB
Volume
206
Category
Article
ISSN
0257-8972

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Motivated by the success of transition metal nanocomposite hard coatings, a new optically transparent coating based on the Al-Si-N ternary system was developed. Al-Si-N thin films were deposited by reactive DC magnetron co-sputtering of Al and Si targets in an Ar/N 2 atmosphere at 200 Β°C and 500 Β°C