✦ LIBER ✦

Structures, mechanical properties and thermal stability of TiN/SiNx multilayer coatings deposited by magnetron sputtering

✍ Scribed by T. An; M. Wen; L.L. Wang; C.Q. Hu; H.W. Tian; W.T. Zheng

Book ID: 116605347
Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 814 KB
Volume: 486
Category: Article
ISSN: 0925-8388
DOI: 10.1016/j.jallcom.2009.06.194

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Structure and mechanical properties of δ

Structure and mechanical properties of δ-NbN/SiNx and δ′-NbN/SiNx nano-multilayer films deposited by reactive magnetron sputtering

✍ M. Wen; Q.N. Meng; C.Q. Hu; T. An; Y.D. Su; W.X. Yu; W.T. Zheng 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 808 KB

NbN/SiN x [X][D] δ′-NbN/SiN x [D] Multilayer [B] Nano-indentation [C] Physical vapour deposition We deposit cubic δ-NbN/SiN x and hexagonal δ′-NbN/SiN x nano-multilayer films using reactive magnetron sputtering in discharge of a mixture of Ar and N 2 gas, and explore the effects of SiN x layer thic

Deposition and structure of W–Cu multila

Deposition and structure of W–Cu multilayer coatings by magnetron sputtering

✍ Wang, C; Brault, P; Zaepffel, C; Thiault, J; Pineau, A; Sauvage, T 📂 Article 📅 2003 🏛 Institute of Physics 🌐 English ⚖ 401 KB

Microstructures, Mechanical Properties,

Microstructures, Mechanical Properties, and Erosion Resistance of Unbalanced Magnetron Sputtering Deposited TiN/VN Nano-structured Coatings

✍ Qi Yang, Mariusz Bielawski, Robert C. McKellar 📂 Article 📅 2012 🏛 Springer-Verlag 🌐 English ⚖ 688 KB

Microstructure and mechanical properties

Microstructure and mechanical properties of carbon nitride multilayer films deposited by DC magnetron sputtering

✍ D.G. Liu; J.P. Tu; H. Zhang; R. Chen; C.D. Gu 📂 Article 📅 2011 🏛 Elsevier Science 🌐 English ⚖ 993 KB

Carbon nitride (CN x /CN x ) multilayers with sequential sp 3 -rich and sp 2 -rich layers were deposited on c-Si substrate by direct current magnetron sputtering. The composition, microstructure and morphology of the films were investigated by the X-ray photoelectron spectroscopy and transmission el

Microstructure and thermal stability of

Microstructure and thermal stability of Ti1-xAlxN coatings deposited by reactive magnetron co-sputtering

✍ Miao Du; Lei Hao; Xiaopeng Liu; Lijun Jiang; Shumao Wang; Fang Lv; Zhinian Li; J 📂 Article 📅 2011 🏛 Elsevier 🌐 English ⚖ 901 KB

Microstructure and mechanical properties

Microstructure and mechanical properties of Al–Si–N transparent hard coatings deposited by magnetron sputtering

✍ A. Pélisson; M. Parlinska-Wojtan; H.J. Hug; J. Patscheider 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 859 KB

Motivated by the success of transition metal nanocomposite hard coatings, a new optically transparent coating based on the Al-Si-N ternary system was developed. Al-Si-N thin films were deposited by reactive DC magnetron co-sputtering of Al and Si targets in an Ar/N 2 atmosphere at 200 °C and 500 °C