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Microstructures, Mechanical Properties, and Erosion Resistance of Unbalanced Magnetron Sputtering Deposited TiN/VN Nano-structured Coatings

โœ Scribed by Qi Yang, Mariusz Bielawski, Robert C. McKellar


Book ID
118304255
Publisher
Springer-Verlag
Year
2012
Tongue
English
Weight
688 KB
Volume
1
Category
Article
ISSN
2192-9262

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Microstructure and mechanical properties
โœ A. Pรฉlisson; M. Parlinska-Wojtan; H.J. Hug; J. Patscheider ๐Ÿ“‚ Article ๐Ÿ“… 2007 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 859 KB

Motivated by the success of transition metal nanocomposite hard coatings, a new optically transparent coating based on the Al-Si-N ternary system was developed. Al-Si-N thin films were deposited by reactive DC magnetron co-sputtering of Al and Si targets in an Ar/N 2 atmosphere at 200 ยฐC and 500 ยฐC