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Grain size effect on structural, electrical and mechanical properties of NiTi thin films deposited by magnetron co-sputtering

✍ Scribed by Ashvani Kumar; Devendra Singh; Davinder Kaur


Book ID
108278508
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
897 KB
Volume
203
Category
Article
ISSN
0257-8972

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Thin films of ZrO 2 were prepared by reactive magnetron sputtering. Annealing of the films exhibited a drastic change in the properties due to improved crystallinity and packing density. The root mean square roughness of the sample observed from atomic force microscope is about 5.75 nm which is comp