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Structural, electrical and transparent properties of ZnO thin films prepared by magnetron sputtering

✍ Scribed by J. Lee; Z. Li; M. Hodgson; J. Metson; A. Asadov; W. Gao


Book ID
108078893
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
544 KB
Volume
4
Category
Article
ISSN
1567-1739

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Thin films of ZrO 2 were prepared by reactive magnetron sputtering. Annealing of the films exhibited a drastic change in the properties due to improved crystallinity and packing density. The root mean square roughness of the sample observed from atomic force microscope is about 5.75 nm which is comp