Electrical and structural properties of
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K.P.S.S. Hembram; Gargi Dutta; Umesh V. Waghmare; G. Mohan Rao
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Article
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2007
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Elsevier Science
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English
β 819 KB
Thin films of ZrO 2 were prepared by reactive magnetron sputtering. Annealing of the films exhibited a drastic change in the properties due to improved crystallinity and packing density. The root mean square roughness of the sample observed from atomic force microscope is about 5.75 nm which is comp