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D.c. properties of ZnO thin films prepared by r.f. magnetron sputtering

โœ Scribed by F.S. Mahmood; R.D. Gould; A.K. Hassan; H.M. Salih

Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
468 KB
Volume
270
Category
Article
ISSN
0040-6090

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Indium-doped zinc oxide films prepared by simultaneous r.f. and d.c. magnetron sputtering
โœ Zhang, Keran; Zhu, Furong; Huan, C. H. A.; Wee, A. T. S.; Osipowicz, T. ๐Ÿ“‚ Article ๐Ÿ“… 1999 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 133 KB ๐Ÿ‘ 2 views

## Indium -doped zinc oxide (ZnO : In) films were prepared by simultaneous r.f. and d.c. magnetron sputtering. The structural, optical and electrical properties of the films have been obtained by x-ray diffractometry (XRD), Rutherford backscattering spectrometry (RBS), spectrophotometry and atomic