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Preparation and properties of Al2O3 films by d.c. and r.f. magnetron sputtering

✍ Scribed by C. Deshpandey; L. Holland

Publisher: Elsevier Science
Year: 1982
Tongue: English
Weight: 325 KB
Volume: 96
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(82)90251-6

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