Maximum Active Concentration of Ion-Implanted Phosphorus During Solid-Phase Epitaxial Recrystallization

✍ Scribed by Suzuki, K.; Tada, Y.; Kataoka, Y.; Kawamura, K.; Nagayama, T.; Nagayama, S.; Magee, C.W.; Buyuklimanli, T.H.; Mueller, D.C.; Fichtner, W.; Zechner, C.

• Book ID: 114618832
• Publisher: IEEE
• Year: 2007
• Tongue: English
• Weight: 337 KB
• Volume: 54
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/ted.2007.901157