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Amorphous–crystalline interface evolution during Solid Phase Epitaxy Regrowth of SiGe films amorphized by ion implantation

✍ Scribed by D. D’Angelo; A.M. Piro; S. Mirabella; C. Bongiorno; L. Romano; A. Terrasi; M.G. Grimaldi

Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 264 KB
Volume: 257
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2007.01.010

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