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Two-dimensional solid phase epitaxial recovery of amorphous Si formed by ion implantation

✍ Scribed by Tamura, M.; Horiuchi, M.

Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 426 KB
Volume: 99
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(90)90521-l

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