✦ LIBER ✦
Enhanced solid phase epitaxial recrystallization of amorphous silicon due to nickel silicide precipitation resulting from ion implantation and annealing
✍ Scribed by A.Yu. Kuznetsov; I.I. Khodos; V.N. Mordkovich; A.F. Vyatkin; N.G. Chichenin
- Book ID
- 113283531
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 206 KB
- Volume
- 80-81
- Category
- Article
- ISSN
- 0168-583X
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