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Magnetically Enhanced Inductively Coupled Plasma Etching of 6H-SiC

✍ Scribed by Kim, D.W.; Lee, H.Y.; Kyoung, S.J.; Kim, H.S.; Sung, Y.J.; Chae, S.H.; Yeom, G.Y.

Book ID: 127080247
Publisher: IEEE
Year: 2004
Tongue: English
Weight: 317 KB
Volume: 32
Category: Article
ISSN: 0093-3813
DOI: 10.1109/tps.2004.828821

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