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Low temperature growth of β-FeSi2 films on Si(111) by RF magnetron sputtering using a FeSi2 alloy target

✍ Scribed by T. Yoshitake; T. Hanada; K. Nagayama

Book ID
110240189
Publisher
Springer
Year
2000
Tongue
English
Weight
54 KB
Volume
19
Category
Article
ISSN
0261-8028

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## Abstract Single‐phase β‐ and α‐FeSi~2~ thin films can be grown on Si(100) with and without a thin Fe buffer layer by adopting a facing target radio‐frequency magnetron sputtering method. The role of the buffer layer on the formation of β‐ and α‐FeSi~2~ thin film was discussed. The composition of