Growth of β-FeSi2 Thin Film on Si (111) by Metal-Organic Chemical Vapor Deposition

✍ Scribed by Akiyama, Kensuke; Ohya, Seishiro; Takano, Hiromichi; Kieda, Nobuo; Funakubo, Hiroshi

• Book ID: 121852953
• Publisher: Institute of Pure and Applied Physics
• Year: 2001
• Tongue: English
• Weight: 259 KB
• Volume: 40
• Category: Article
• ISSN: 0021-4922
• DOI: 10.1143/JJAP.40.L460