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Metalorganic chemical vapor deposition of β-FeSi2 on β-FeSi2 seed crystals formed on Si substrates

✍ Scribed by Mitsushi Suzuno; Keiichi Akutsu; Hideki Kawakami; Kensuke Akiyama; Takashi Suemasu

Book ID: 113937051
Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 956 KB
Volume: 519
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2011.05.029

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