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Effect of Al incorporation on the crystallization kinetics of amorphous FeSi2 into poly β-FeSi2 film on SiO2/Si(100) substrate

✍ Scribed by Dennis Tan; Chee Tee Chua; Goutam Kumar Dalapati; Dongzhi Chi

Book ID: 113937315
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 431 KB
Volume: 520
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2011.10.010

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