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Low-temperature growth of gallium nitride films by inductively coupled-plasma-enhanced reactive magnetron sputtering

✍ Scribed by Ni, Chih-Jui; Chau-Nan Hong, Franklin

Book ID: 121753897
Publisher: AVS (American Vacuum Society)
Year: 2014
Tongue: English
Weight: 915 KB
Volume: 32
Category: Article
ISSN: 0734-2101
DOI: 10.1116/1.4871472

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