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The Growth of Gallium Nitride Films Produced by Reactive Sputtering at Low Temperature

✍ Scribed by Young, W. T. ;Silva, S. R. P. ;Benyoucef, M. ;Kuball, M. ;Anguita, J. V. ;Shannon, J. M. ;Homewood, K. P. ;Sealy, B. J.


Publisher
John Wiley and Sons
Year
1999
Tongue
English
Weight
116 KB
Volume
176
Category
Article
ISSN
0031-8965

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Low-Temperature Synthesis of Gallium Nit
✍ Bondar, V. ;Kucharsky, I. ;Simkiv, B. ;Akselrud, L. ;Davydov, V. ;Dubov, Yu. ;Po πŸ“‚ Article πŸ“… 1999 πŸ› John Wiley and Sons 🌐 English βš– 131 KB πŸ‘ 2 views

The technologies of fabrication of thin film phosphors based on gallium nitride using rf-magnetron sputtering are developed and properties of films are studied. Spectral parameters of rf-discharge plasma emission of nitrogen used as a working gas are investigated. The dependence of GaN thin film dep