Low-Temperature Synthesis of Gallium Nit
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Bondar, V. ;Kucharsky, I. ;Simkiv, B. ;Akselrud, L. ;Davydov, V. ;Dubov, Yu. ;Po
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Article
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1999
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John Wiley and Sons
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English
β 131 KB
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The technologies of fabrication of thin film phosphors based on gallium nitride using rf-magnetron sputtering are developed and properties of films are studied. Spectral parameters of rf-discharge plasma emission of nitrogen used as a working gas are investigated. The dependence of GaN thin film dep