Rapid Growth of Hard and Compact Layers of Stoichiometric ZrN by DC Reactive Magnetron Sputtering Pulsed at Low Frequency

✍ Scribed by J. P. Dauchot; R. Gouttebaron; M. Wautelet; M. Hecq

• Publisher: John Wiley and Sons
• Year: 2000
• Tongue: English
• Weight: 294 KB
• Volume: 2
• Category: Article
• ISSN: 1438-1656
• DOI: 10.1002/1527-2648(200012)2:12<824::aid-adem824>3.0.co;2-i