Synthesis of stoichiometric zirconium nitride by d.c. reactive magnetron sputtering pulsed at low frequency: characterization by ESCA, SIMS and electron microprobe

✍ Scribed by J. P. Dauchot; R. Gouttebaron; D. Cornelissen; M. Wautelet; M. Hecq

• Publisher: John Wiley and Sons
• Year: 2000
• Tongue: English
• Weight: 106 KB
• Volume: 30
• Category: Article
• ISSN: 0142-2421
• DOI: 10.1002/1096-9918(200008)30:1<607::aid-sia860>3.0.co;2-6