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Aluminum Dimethylisopropoxide Decomposition and the Growth of Dense Alumina Thin Films at Low Temperature

✍ Scribed by G. A. Battiston; R. Gerbasi

Publisher: John Wiley and Sons
Year: 2002
Tongue: English
Weight: 159 KB
Volume: 8
Category: Article
ISSN: 0948-1907
DOI: 10.1002/1521-3862(20020903)8:5<193::aid-cvde193>3.0.co;2-h

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