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Low-temperature formation of gate-sio2 films for poly-si tfts by o2-ar sputtering

✍ Scribed by Shiro Suyama; Akio Okamoto; Seiiti Shirai; Tadashi Serikawa

Book ID: 112078815
Publisher: John Wiley and Sons
Year: 1993
Tongue: English
Weight: 622 KB
Volume: 76
Category: Article
ISSN: 8756-663X
DOI: 10.1002/ecjb.4420760910

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