Low temperature preparation of transparent, antireflective TiO2 films deposited at different O2/Ar ratios by microwave electron cyclotron resonance magnetron sputtering

✍ Scribed by Wen Du; Yinping Ye; Hongxuan Li; Fei Zhao; Li Ji; Weilong Quan; Jianmin Chen; Huidi Zhou

• Book ID: 113940967
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 977 KB
• Volume: 86
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/j.vacuum.2012.01.012