Low temperature fabrication of APCVD a-Si thin film transistors with ion doped layer

✍ Scribed by Kyung Ha Lee; Jae Ho Yoo; Byeong Yeon Moon; Jae Hoon Jung; Jin Jang; S.M. Pietruszko; Min Koo Han; Hyuk Ryeol Park

• Book ID: 115991093
• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 289 KB
• Volume: 198-200
• Category: Article
• ISSN: 0022-3093
• DOI: 10.1016/0022-3093(96)00065-8