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Fabrication of thin film transistors using a Si/Si/sub 1-x/Ge/sub x//Si triple layer film on a SiO2 substrate

✍ Scribed by Jin Hyeok Kim; Jeong Yong Lee; Hong Seung Kim; Yoon-ho Song; Kee-soo Nam

Book ID: 126609438
Publisher: IEEE
Year: 1996
Tongue: English
Weight: 404 KB
Volume: 17
Category: Article
ISSN: 0741-3106
DOI: 10.1109/55.491830

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