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Textured Ni(Pt) Germanosilicide Formation on a Condensed Si[sub 1−x]Ge[sub x]/Si Substrate

✍ Scribed by Setiawan, Y.; Balakumar, S.; Tan, E. J.; Pey, K. L.; Lee, P. S.

Book ID: 115462788
Publisher: The Electrochemical Society
Year: 2009
Tongue: English
Weight: 972 KB
Volume: 156
Category: Article
ISSN: 0013-4651
DOI: 10.1149/1.3121204

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