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Low temperature processing of indium-tin-zinc oxide channel layers in fabricating thin-film transistors

✍ Scribed by Lee, Ki Chang ;Jo, Kwang-Min ;Sung, Sang-Yun ;Lee, Joon-Hyung ;Kim, Jeong-Joo ;Jeong, Byoung-Seong ;Pearton, S. J. ;Norton, D. P. ;Heo, Young-Woo

Book ID: 127257361
Publisher: AVS (American Vacuum Society)
Year: 2011
Tongue: English
Weight: 456 KB
Volume: 29
Category: Article
ISSN: 1520-8567
DOI: 10.1116/1.3553205

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