✦ LIBER ✦

Low temperature epitaxial silicon film growth using high vacuum electron-cyclotron-resonance plasma deposition

✍ Scribed by S. J. Deboer; V. L. Dalal; G. Chumanov; R. Bartels

Book ID: 126072323
Publisher: American Institute of Physics
Year: 1995
Tongue: English
Weight: 290 KB
Volume: 66
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.113156

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