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Low temperature growth of highly conductive boron-doped germanium thin films by electron cyclotron resonance chemical vapor deposition

✍ Scribed by Chang, Teng-Hsiang; Chang, Chiao; Chu, Yen-Ho; Lee, Chien-Chieh; Chang, Jenq-Yang; Chen, I-Chen; Li, Tomi

Book ID: 123240998
Publisher: Elsevier Science
Year: 2014
Tongue: English
Weight: 620 KB
Volume: 551
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2013.11.099

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