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Electrical properties of PZT thin films deposited by electron cyclotron resonance plasma enhanced chemical vapor deposition

✍ Scribed by S.T. Kim; J.W. Kim; S.W. Jung; J.S. Shin; S.T. Ahn; W.J. Lee

Book ID: 113300725
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 421 KB
Volume: 45
Category: Article
ISSN: 0254-0584
DOI: 10.1016/0254-0584(96)80094-0

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