Low-temperature synthesis of AlN films through electron cyclotron resonance plasma-aided reactive pulsed laser deposition

✍ Scribed by J. Sun; J.D. Wu; Z.F. Ying; W. Shi; Z.Y. Zhou; K.L. Wang; X.M. Ding; F.M. Li

• Publisher: Springer
• Year: 2001
• Tongue: English
• Weight: 155 KB
• Volume: 73
• Category: Article
• ISSN: 1432-0630
• DOI: 10.1007/s003390100499