Formation of CNx thin films by reactive pulsed laser deposition assisted by electron cyclotron resonance microwave discharge

✍ Scribed by W. Shi; J.D. Wu; J. Sun; H. Ling; Z.F. Ying; X.M. Ding; Z.Y. Zhou; F.M. Li

• Publisher: Springer
• Year: 2001
• Tongue: English
• Weight: 105 KB
• Volume: 73
• Category: Article
• ISSN: 1432-0630
• DOI: 10.1007/s003390100806