Low temperature growth of GaN single crystal films using electron cyclotron resonance plasma excited metalorganic vapor phase epitaxy

✍ Scribed by Sakae Zembutsu; Toru Sasaki

• Publisher: Elsevier Science
• Year: 1986
• Tongue: English
• Weight: 477 KB
• Volume: 77
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(86)90309-x