✦ LIBER ✦

Low resistivity tungsten for 32 nm node MOL contacts and beyond

✍ Scribed by Filippos Papadatos; Keith Wong; Valli Arunachalam; Chung Hwan Shin; Zhengwen Li; Michael Chudzik; Woo-Hyeong Lee; Aimin Xing

No coin nor oath required. For personal study only.

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Low resistivity tungsten for 32&#xa0;nm node MOL contacts and beyond