Fullerene Resist Materials for the 32 nm Node and Beyond

✍ Scribed by Francis P. Gibbons; Alex P. G. Robinson; Richard E. Palmer; Sara Diegoli; Mayandithevar Manickam; Jon A. Preece

• Book ID: 101415333
• Publisher: John Wiley and Sons
• Year: 2008
• Tongue: English
• Weight: 250 KB
• Volume: 18
• Category: Article
• ISSN: 1616-301X
• DOI: 10.1002/adfm.200701155