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Low energy Cn cluster ion induced damage effects in Si(1 0 0) substrates

✍ Scribed by H.P. Lenka; B. Joseph; P.K. Kuiri; G. Sahu; D.P. Mahapatra

Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 148 KB
Volume: 256
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2006.12.186

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