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Blistering effects of low energy hydrogen and helium ions implanted in GaAs(1 0 0) crystals

✍ Scribed by A. Giguère; N. Desrosiers; B. Terreault

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 162 KB
Volume: 242
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2005.08.187

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