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Low energy (≤100 eV) sputtering of thin molybdenum nitride films

✍ Scribed by David A. Baldwin; Noah Shamir; Petr Hochmann; J. Wayne Rabalais

Publisher: Elsevier Science
Year: 1983
Weight: 65 KB
Volume: 130
Category: Article
ISSN: 0167-2584
DOI: 10.1016/0167-2584(83)90626-6

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