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Sputtering of polycrystalline metals by inert gas ions of low energy (100–1000 eV)

✍ Scribed by C.H. Weijsenfeld; A. Hoogendoorn; M. Koedam


Publisher
Elsevier Science
Year
1961
Weight
101 KB
Volume
27
Category
Article
ISSN
0031-8914

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