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Nitridation of thin SiO2 films induced by low energy (3–100 eV) electron bombardment

✍ Scribed by V. Garcia; A. Glachant; J.C. Bureau; B. Balland; C. Plossu; J.C. Dupuy; A. Straboni


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
275 KB
Volume
22
Category
Article
ISSN
0167-9317

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