✦ LIBER ✦
Control of ion bombardment energy in the low-temperature deposition of highly transparent and conducting In2O3 and ZnO thin films by activated reactive evaporation: W S Lau, J Vac Sci Technol, A6, 1988, 2015–2019
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 143 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0042-207X
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